SPAM
Surface Physics for Advanced Manufacturing
| Coordinator | CARL ZEISS AG ; National Centre of Scientific Research Demokritos ; ASML (Netherlands) ; Wageningen University ; NEDERLANDSE ORGANISATIE VOOR TOEGEPAST NATUURWETENSCHAPPELIJK ONDERZOEK TNO ; LaVision GmbH ; University of Stuttgart ; ADIXEN VACUUM PRODUCTS SAS ; INTERUNIVERSITAIR MICRO-ELECTRONICA CENTRUM ; University of Twente ; Delft University of Technology ; University of Würzburg |
| Grant period | 2008-10-01 - 2012-09-30 |
| Funding body | European Union |
| Call number | FP7-PEOPLE-2007-1-1-ITN |
| Grant number | 215723 |
| Identifier | G:(EU-Grant)215723 |