SPAM

Surface Physics for Advanced Manufacturing

CoordinatorCARL ZEISS AG ; National Centre of Scientific Research Demokritos ; ASML (Netherlands) ; Wageningen University ; NEDERLANDSE ORGANISATIE VOOR TOEGEPAST NATUURWETENSCHAPPELIJK ONDERZOEK TNO ; LaVision GmbH ; University of Stuttgart ; ADIXEN VACUUM PRODUCTS SAS ; INTERUNIVERSITAIR MICRO-ELECTRONICA CENTRUM ; University of Twente ; Delft University of Technology ; University of Würzburg
Grant period2008-10-01 - 2012-09-30
Funding bodyEuropean Union
Call numberFP7-PEOPLE-2007-1-1-ITN
Grant number215723
IdentifierG:(EU-Grant)215723

     

Recent Publications

There are no publications


 Record created 2012-12-05, last modified 2023-03-01