Concept of a new turbomolecular pump with central opening for free axial access

Mokler, P. H.

ATP

Concept of a new turbomolecular pump with central opening for free axial access—The Ring turbomolecular pump

Vacuum

Elsevier Science

Amsterdam [u.a.]

0042-207X

10.1016/j.vacuum.2007.05.006

eng 408 - 411 4 82 0, ; PUB:(DE-HGF)16, ;

WOS:000251842800009

Journal Article

2007

GSI-2016-01302

2007

https://repository.gsi.de/record/186804 https://doi.org/10.1016/j.vacuum.2007.05.006 <Go to ISI>://WOS:000251842800009