IEEE transactions on semiconductor manufacturing: a publication of the IEEE Components, Packaging, and Manufacturing Technology, the IEEE Electron Devices Society, the IEEE Reliability Society, the IEEE Solid State Circuits Society
	Common abbreviations: IEEE Trans. Semicond. Manuf. (USA) [DE-600]

Type:	journal
DDC:	620
Keywords(s):	Halbleitertechnologie, Zeitschrift, Online-Ressource, Condensed Matter Physics, Industrial and Manufacturing Engineering, Electronic, Optical and Magnetic Materials, Electrical and Electronic Engineering
CODEN:	ITSMED
ISSN(s):	0894-6507, 1558-2345
Publisher:	IEEE : New York, NY 1988-
Country:	United States of America
Appears:	online, print
ID:	PERI:(DE-600)2035198-7

Database coverage:
Clarivate Analytics Master Journal List ; Current Contents - Electronics and Telecommunications Collection ; Current Contents - Engineering, Computing and Technology ; Ebsco Academic Search ; Essential Science Indicators ; IF < 5 ; JCR ; SCOPUS ; Science Citation Index Expanded ; Web of Science Core Collection