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Nanoprober für Fehleranalyse und Prozessentwicklung in der Halbleiterindustrie
| Grant period | 2013-03-01 - 2016-08-31 |
| Funding body | Federal Ministry of Education and Research |
| BMBF | |
| Grant number | grant.8018662 |
| Identifier | G:(BMBF)03V0298 |
Recent Publications
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Record created 2021-09-20, last modified 2021-09-22