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EUV ptychography: material-specific imaging at the nanoscale
Rothhardt, J. (Corresponding author)GSI* ; Eschen, W.GSI* ; Liu, C.HIJ* ; Penagos M., D. S.GSI* ; Klas, R.HIJ* ; Limpert, J.HIJ* ; Stella, E. (Editor) ; Ceglarek, D. (Editor) ; Kemao, Q. (Editor) ; Soldovieri, F. (Editor)
2023
SPIE
2023Multimodal Sensing and Artificial Intelligence: Technologies and Applications III : [Proceedings] - SPIE, 2023. - ISBN 97815106645179781510664524 - doi:10.1117/12.2678398
Multimodal Sensing and Artificial Intelligence: Technologies and Applications III, MunichMunich, Germany, 26 Jun 2023 - 30 Jun 20232023-06-262023-06-30
SPIE (2023) [10.1117/12.2678398]2023
Please use a persistent id in citations: doi:10.1117/12.2678398
Contributing Institute(s):
- HIJ / HL (JHL)
Research Program(s):
- 622 - Detector Technologies and Systems (POF4-622) (POF4-622)
Experiment(s):
- External experiment at external facility/ no experiment at GSI (other)
Appears in the scientific report
2023