engKlimes, Jeffrey WilliamKanika, KanikaKrishnan, AryaReich, Bianca BettinaAnjum, KhwaishBaus, P.Birkl, G.Quint, WolfgangSchott, W.Vogel, ManuelCryogenic vacuum valve with actuation times down to 50 msinfo:eu-repo/classification/ddc/620Review of scientific instruments 94(11), 113202 (2023). doi:10.1063/5.0158043info:eu-repo/semantics/articleinfo:eu-repo/semantics/publishedVersionAmerican Institute of Physics2023info:eu-repo/semantics/openAccessDEhttps://repository.gsi.de/record/347259https://repository.gsi.de/search?p=id:%22GSI-2023-00968%22Researchersinfo:eu-repo/semantics/altIdentifier/issn/1089-7623info:eu-repo/semantics/altIdentifier/pmid/pmid:37975747info:eu-repo/semantics/altIdentifier/doi/10.15120/GSI-2023-00968info:eu-repo/semantics/altIdentifier/wos/WOS:001106183800001info:eu-repo/semantics/altIdentifier/doi/10.1063/5.0158043info:eu-repo/semantics/altIdentifier/issn/1527-2400info:eu-repo/semantics/altIdentifier/issn/0034-6748