engAbel, Johann J.Apell, JonathanFuchs, SilvioWiesner, FelixReinhard, JuliusWünsche, MartinFelde, NadjaSchmidl, GabrielePlentz, JonathanPaulus, Gerhard G.Lippmann, StephanieNon-destructive depth reconstruction of $Al-Al_{2}Cu$ layer structure with nanometer resolution using extreme ultraviolet coherence tomographyinfo:eu-repo/classification/ddc/670Materials characterization 211, 113894 (2024). doi:10.1016/j.matchar.2024.113894info:eu-repo/semantics/articleinfo:eu-repo/semantics/publishedVersionScience Direct2024info:eu-repo/semantics/openAccessDEhttps://repository.gsi.de/record/350388https://repository.gsi.de/search?p=id:%22GSI-2024-00554%22Researchersinfo:eu-repo/semantics/altIdentifier/issn/1044-5803info:eu-repo/semantics/altIdentifier/wos/WOS:001232537500001info:eu-repo/semantics/altIdentifier/doi/10.15120/GSI-2024-00554info:eu-repo/semantics/altIdentifier/issn/1873-4189info:eu-repo/semantics/altIdentifier/doi/10.1016/j.matchar.2024.113894