Non-destructive depth reconstruction of $Al-Al_{2}Cu$ layer structure with nanometer resolution using extreme ultraviolet coherence tomography

Abel, Johann J. Apell, Jonathan Wiesner, Felix Reinhard, Julius Wünsche, Martin Felde, Nadja Schmidl, Gabriele Plentz, Jonathan Paulus, Gerhard G. Lippmann, Stephanie Fuchs, Silvio

PTS

Materials characterization

Science Direct

New York, NY

1044-5803

10.1016/j.matchar.2024.113894

English 113894 211 Supported by ESF and Free State of Thuringia under grant # 2015 FGR 0094 and 2018 FGR 0080. Supported by BMBF under grant VIP "X-CoherenT". This is an open access article under the CC BY license (http://creativecommons.org/licenses/by/4.0/). ; PUB:(DE-HGF)16, ; 0, ;

WOS:001232537500001

Journal Article

2024

GSI-2024-00554

2024

https://repository.gsi.de/record/350388 https://doi.org/10.1016/j.matchar.2024.113894 <Go to ISI>://WOS:001232537500001