Record #354643 - GSI Repository

BMBF-13N16678

Milliwatt-level efficient gas harmonic EUV source (MEGA-EUV) Multi-pass cell development for post-compression and spectral tuning

Coordinator	Heyl, Christoph
Grant period	2023-12-01 - 2026-11-30
Funding body	Bundesministerium für Bildung und Forschung
	BMBF
Identifier	G:(DE-H253)BMBF-13N16678

Note: DESY is cooperating with Class 5 Photonics, the University of Hamburg, Amphos and partners from the semiconductor industry as part of the "MEGA-EUV" project. The aim of the project is to develop a high-performance, extreme ultraviolet (EUV) beam source that will achieve up to a 1000-fold increase in throughput for the inspection of microchips.

Recent Publications

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Journal Article Rajhans, S. (Corresponding author) ; Rupp, N. ; Escoto, E. ; Schönberg, A. ; Laumer, D. ; Sumfleth, M. ; Abdallah, I. ; Manschwetus, B. ; Juliano, C. ; Javid, N. ; Arnold, C. L. ; Gorkhover, T. ; Drescher, M. ; Riedel, R. ; Hartl, I. ; Heyl, C.GSI* ; Lang, T.
Optical parametric multi-pass cell amplifier
Optica 13(7), 1303 - (2026) [10.1364/OPTICA.597010]2026 DBCoverage BibTeX | EndNote: XML, Text | RIS

Journal Article Biesterfeld, P. ; Schönberg, A. ; Seitz, M. ; Jimenez De la vega, N. E.GSI* ; Lang, T. ; Seidel, M.GSI* ; Balla, P. ; Winkelmann, L. ; Sunny, J. K. ; Fröhlich, S. ; Mosel, P. ; Hartl, I. ; Calegari, F. ; Morgner, U. ; Kovacev, M. ; Heyl, C.GSI* ; Trabattoni, A. (Corresponding author)
Post-compression of a Q-switched laser in a glass-rod multi-pass cell
JPhys photonics 8(1), 015013 (2026) [10.1088/2515-7647/ae1fc4]2026 OpenAccess Files BibTeX | EndNote: XML, Text | RIS

Journal Article Escoto, E. (Corresponding author) ; Pressacco, F. ; Jiang, Y. ; Rajhans, S. ; Khodakovskiy, N. ; Hartl, I. ; Seidel, M.GSI* ; Heyl, C.GSI* ; Tünnermann, H. (Corresponding author)
Improved temporal characteristics for post-compressed pulses via application-tailored nonlinear polarization ellipse rotation
Optics letters 49(23), 6841 (2024) [10.1364/OL.539646]2024 OpenAccess Files BibTeX | EndNote: XML, Text | RIS

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Record created 2024-12-01, last modified 2024-12-01

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