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@INPROCEEDINGS{Liu:362102,
      author       = {Liu, Chang and Licht, Leona and Eschen, Wilhelm and Penagos
                      Molina, Daniel Santiago and Limpert, Jens and Rothhardt,
                      Jan},
      title        = {{H}igh-{R}esolution and {H}igh-{S}peed {EUV}
                      {P}tychography: {Q}uantitative {I}maging {W}ith {E}nhanced
                      {M}aterial {C}ontrast},
      publisher    = {IEEE},
      reportid     = {GSI-2025-01065},
      year         = {2025},
      comment      = {2025 Conference on Lasers and Electro-Optics Europe $\&$
                      European Quantum Electronics Conference (CLEO/Europe-EQEC) :
                      [Proceedings] - IEEE, 2025. - ISBN 979-8-3315-1252-1 -
                      doi:10.1109/CLEO/Europe-EQEC65582.2025.11109452},
      booktitle     = {2025 Conference on Lasers and
                       Electro-Optics Europe $\&$ European
                       Quantum Electronics Conference
                       (CLEO/Europe-EQEC) : [Proceedings] -
                       IEEE, 2025. - ISBN 979-8-3315-1252-1 -
                       doi:10.1109/CLEO/Europe-EQEC65582.2025.11109452},
      month         = {Jun},
      date          = {2025-06-23},
      organization  = {2025 Conference on Lasers and
                       Electro-Optics Europe $\&$ European
                       Quantum Electronics Conference
                       (CLEO/Europe-EQEC), Munich (Germany),
                       23 Jun 2025 - 27 Jun 2025},
      cin          = {JHL},
      cid          = {I:(DE-Ds200)JHL-20220701OR461},
      pnm          = {631 - Matter – Dynamics, Mechanisms and Control
                      (POF4-631)},
      pid          = {G:(DE-HGF)POF4-631},
      experiment   = {$EXP:(DE-Ds200)External_experiment-20200803$},
      typ          = {PUB:(DE-HGF)8 / PUB:(DE-HGF)7},
      doi          = {10.1109/CLEO/Europe-EQEC65582.2025.11109452},
      url          = {https://repository.gsi.de/record/362102},
}