%0 Conference Paper
%A Penagos Molina, Daniel S.
%A Abdelaal, Mahmoud
%A Eschen, Wilhelm
%A Chew, Soo Hoon
%A Klas, Robert
%A Limpert, Jens
%A Rothhardt, Jan
%T Ångström-scale surface metrology enabled by a compact milliwatt-class HHG source
%I Optica Publishing Group Washington, D.C.
%M GSI-2026-00522
%D 2025
%< Optica Imaging Congress 2025 (3D, DH, COSI, IS, pcAOP,RadIT) : [Proceedings] - Optica Publishing Group Washington, D.C., 2025. - ISBN - doi:10.1364/COSI.2025.JM3B.4
%B Computational Optical Sensing and Imaging
%C 18 Aug 2025 - 21 Aug 2025, Seattle (USA)
Y2 18 Aug 2025 - 21 Aug 2025
M2 Seattle, USA
%F PUB:(DE-HGF)8 ; PUB:(DE-HGF)7
%9 Contribution to a conference proceedingsContribution to a book
%R 10.1364/COSI.2025.JM3B.4
%U https://repository.gsi.de/record/366533