TY  - CONF
AU  - Penagos Molina, Daniel S.
AU  - Abdelaal, Mahmoud
AU  - Eschen, Wilhelm
AU  - Chew, Soo Hoon
AU  - Klas, Robert
AU  - Limpert, Jens
AU  - Rothhardt, Jan
TI  - Ångström-scale surface metrology enabled by a compact milliwatt-class HHG source
PB  - Optica Publishing Group Washington, D.C.
M1  - GSI-2026-00522
PY  - 2025
T2  - Computational Optical Sensing and Imaging
CY  - 18 Aug 2025 - 21 Aug 2025, Seattle (USA)
Y2  - 18 Aug 2025 - 21 Aug 2025
M2  - Seattle, USA
LB  - PUB:(DE-HGF)8 ; PUB:(DE-HGF)7
DO  - DOI:10.1364/COSI.2025.JM3B.4
UR  - https://repository.gsi.de/record/366533
ER  -