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@INPROCEEDINGS{PenagosMolina:366533,
      author       = {Penagos Molina, Daniel S. and Abdelaal, Mahmoud and Eschen,
                      Wilhelm and Chew, Soo Hoon and Klas, Robert and Limpert,
                      Jens and Rothhardt, Jan},
      title        = {Ångström-scale surface metrology enabled by a compact
                      milliwatt-class {HHG} source},
      publisher    = {Optica Publishing Group Washington, D.C.},
      reportid     = {GSI-2026-00522},
      year         = {2025},
      comment      = {Optica Imaging Congress 2025 (3D, DH, COSI, IS,
                      pcAOP,RadIT) : [Proceedings] - Optica Publishing Group
                      Washington, D.C., 2025. - ISBN -
                      doi:10.1364/COSI.2025.JM3B.4},
      booktitle     = {Optica Imaging Congress 2025 (3D, DH,
                       COSI, IS, pcAOP,RadIT) : [Proceedings]
                       - Optica Publishing Group Washington,
                       D.C., 2025. - ISBN -
                       doi:10.1364/COSI.2025.JM3B.4},
      month         = {Aug},
      date          = {2025-08-18},
      organization  = {Computational Optical Sensing and
                       Imaging, Seattle (USA), 18 Aug 2025 -
                       21 Aug 2025},
      cin          = {JHL},
      cid          = {I:(DE-Ds200)JHL-20220701OR461},
      pnm          = {631 - Matter – Dynamics, Mechanisms and Control
                      (POF4-631)},
      pid          = {G:(DE-HGF)POF4-631},
      experiment   = {$EXP:(DE-Ds200)External_experiment-20200803$},
      typ          = {PUB:(DE-HGF)8 / PUB:(DE-HGF)7},
      doi          = {10.1364/COSI.2025.JM3B.4},
      url          = {https://repository.gsi.de/record/366533},
}