engPenagos Molina, Daniel S.Abdelaal, MahmoudEschen, WilhelmChew, Soo HoonKlas, RobertLimpert, JensRothhardt, JanÅngström-scale surface metrology enabled by a compact milliwatt-class HHG sourceOptica Publishing Group Washington, D.C. (2025). doi:10.1364/COSI.2025.JM3B.4info:eu-repo/semantics/conferenceObjectinfo:eu-repo/semantics/publishedVersionOptica Imaging Congress 2025 (3D, DH, COSI, IS, pcAOP,RadIT) : [Proceedings] - Optica Publishing Group Washington, D.C., 2025. - ISBN - doi:10.1364/COSI.2025.JM3B.4Optica Imaging Congress 2025 (3D, DH, COSI, IS, pcAOP,RadIT) : [Proceedings] - Optica Publishing Group Washington, D.C., 2025. - ISBN - doi:10.1364/COSI.2025.JM3B.4<br/>Computational Optical Sensing and Imaging, Seattle, USA, 2025-08-18 - 2025-08-21Optica Publishing Group Washington, D.C.2025info:eu-repo/semantics/closedAccessDEhttps://repository.gsi.de/record/366533https://repository.gsi.de/search?p=id:%22GSI-2026-00522%22Researchersinfo:eu-repo/semantics/altIdentifier/doi/10.1364/COSI.2025.JM3B.4