366533 20260319233028.0 10.1364/COSI.2025.JM3B.4 doi GSI-2026-00522 Penagos Molina, Daniel S. P:(DE-Ds200)OR10772 0 Corresponding author Computational Optical Sensing and Imaging Seattle 2025-08-18 - 2025-08-21 USA Ångström-scale surface metrology enabled by a compact milliwatt-class HHG source 2025 Optica Publishing Group Washington, D.C. Optica Imaging Congress 2025 (3D, DH, COSI, IS, pcAOP,RadIT) : [Proceedings] - Optica Publishing Group Washington, D.C., 2025. - ISBN - doi:10.1364/COSI.2025.JM3B.4 CONFERENCE_PAPER ORCID Conference Paper 33 EndNote INPROCEEDINGS BibTeX conferenceObject DRIVER Output Types/Conference Paper DataCite Contribution to a conference proceedings contrib contrib PUB:(DE-HGF)8 1773923688_1083542 PUB:(DE-HGF) Contribution to a book PUB:(DE-HGF)7 PUB:(DE-HGF) contb 631 - Matter – Dynamics, Mechanisms and Control (POF4-631) G:(DE-HGF)POF4-631 POF4-631 POF IV 0 Dataset connected to CrossRef Conference other External experiment at external facility/ no experiment at GSI (other) EXP:(DE-Ds200)other-20200803 EXP:(DE-Ds200)External_experiment-20200803 EXP:(DE-Ds200)External_experiment-20200803 0 Abdelaal, Mahmoud P:(DE-HGF)0 1 Eschen, Wilhelm P:(DE-Ds200)OR10557 2 Chew, Soo Hoon P:(DE-HGF)0 3 Klas, Robert P:(DE-Ds200)OR7769 4 Limpert, Jens P:(DE-HGF)0 5 Rothhardt, Jan P:(DE-Ds200)OR5193 6 10.1364/COSI.2025.JM3B.4 oai:repository.gsi.de:366533 VDB GSI Helmholtzzentrum für Schwerionenforschung GmbH I:(DE-Ds200)20121206GSI GSI 0 P:(DE-Ds200)OR10772 External Helmholtz Institute: HIJ I:(DE-Ds200)Ext-HIJ HIJ 2 P:(DE-Ds200)OR10557 External Helmholtz Institute: HIJ I:(DE-Ds200)Ext-HIJ HIJ 4 P:(DE-Ds200)OR7769 GSI Helmholtzzentrum für Schwerionenforschung GmbH I:(DE-Ds200)20121206GSI GSI 4 P:(DE-Ds200)OR7769 External Helmholtz Institute: HIJ I:(DE-Ds200)Ext-HIJ HIJ 5 P:(DE-HGF)0 GSI Helmholtzzentrum für Schwerionenforschung GmbH I:(DE-Ds200)20121206GSI GSI 6 P:(DE-Ds200)OR5193 DE-HGF Forschungsbereich Materie Von Materie zu Materialien und Leben G:(DE-HGF)POF4-630 G:(DE-HGF)POF4-631 G:(DE-HGF)POF4 G:(DE-HGF)POF4-600 G:(DE-HGF)POF Matter – Dynamics, Mechanisms and Control 0 I:(DE-Ds200)JHL-20220701OR461 JHL HIJ / HL 0 contrib VDB contb I:(DE-Ds200)JHL-20220701OR461 UNRESTRICTED