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@INBOOK{Bellachioma:68068,
      author       = {Bellachioma, M. C. and Cavaco, J. and Kolligs, C. and
                      Krämer, A. and Kurdal, J.},
      title        = {{S}tatus of the {C}oating {A}ctivities at the {M}agnetron
                      {S}puttering {F}acility},
      volume       = {2014-1},
      issn         = {0171-4546},
      address      = {Darmstadt},
      publisher    = {GSI Helmholtzzentrum für Schwerionenforschung},
      reportid     = {GSI-SR2013-FG-CS-14, GSI Report 2014-1},
      series       = {GSI Report},
      pages        = {386 p.},
      year         = {2014},
      comment      = {Scientific Report 2013},
      booktitle     = {Scientific Report 2013},
      cin          = {PRO / VAC / BUD},
      cid          = {I:(DE-Ds200)PRO-20160831OR356 /
                      I:(DE-Ds200)VAC-20121002OR253 /
                      I:(DE-Ds200)BUD-20051214OR030},
      pnm          = {54G - GSI-participation in FAIR (POF2-54G32) / GSI Machine
                      Common Sytems (GSILSFCS)},
      pid          = {G:(DE-HGF)POF2-54G32 / G:(DE-Ds200)GSILSFCS},
      typ          = {PUB:(DE-HGF)7 / PUB:(DE-HGF)15},
      doi          = {10.15120/GR-2014-1-FG-CS-14},
      url          = {https://repository.gsi.de/record/68068},
}