%0 Thesis
%A Tuitje, Frederik
%T Diffraction-based metrology in the extreme ultraviolet
%I Friedrich-Schiller-Universität Jena
%V Dissertation
%M GSI-2021-00391
%P 135 p.
%D 2020
%Z CCby4
%Z Dissertation, Friedrich-Schiller-Universität Jena, 2020
%F PUB:(DE-HGF)11
%9 Dissertation / PhD Thesis
%R 10.22032/DBT.46898
%U https://repository.gsi.de/record/237396