Dissertation / PhD Thesis GSI-2021-00391

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Diffraction-based metrology in the extreme ultraviolet

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2020

135 p. () [10.22032/DBT.46898] = Dissertation, Friedrich-Schiller-Universität Jena, 2020

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Note: CCby4
Note: Dissertation, Friedrich-Schiller-Universität Jena, 2020

Contributing Institute(s):
  1. HI Jena (HIJ)
Research Program(s):
  1. HGS-HIRe - HGS-HIRe for FAIR (HGS-HIRe) (HGS-HIRe)
  2. 631 - Accelerator R & D (POF3-631) (POF3-631)
Experiment(s):
  1. External experiment at external facility/ no experiment at GSI (POF3; other)

Appears in the scientific report 2020
Database coverage:
Creative Commons Attribution CC BY 4.0 ; OpenAccess
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HI Jena

 Record created 2021-02-15, last modified 2023-03-17