TY  - THES
AU  - Tuitje, Frederik
TI  - Diffraction-based metrology in the extreme ultraviolet
PB  - Friedrich-Schiller-Universität Jena
VL  - Dissertation
M1  - GSI-2021-00391
SP  - 135 p.
PY  - 2020
N1  - CCby4
N1  - Dissertation, Friedrich-Schiller-Universität Jena, 2020
LB  - PUB:(DE-HGF)11
DO  - DOI:10.22032/DBT.46898
UR  - https://repository.gsi.de/record/237396
ER  -