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Structured illumination ptychography and at-wavelength characterization with an EUV diffuser at 13.5 nm wavelength
Eschen, W. (Corresponding author)GSI* ; Liu, C.GSI* ; Steinert, M. ; Penagos Molina, D. S.GSI* ; Siefke, T. ; Zeitner, U. D. ; Kaspar, J. ; Pertsch, T.GSI*HIJ* ; Limpert, J.GSI*HIJ* ; Rothhardt, J.GSI*
2024
Optica
Washington, DC
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Please use a persistent id in citations: doi:10.1364/OE.507715 doi:10.15120/GSI-2024-00483
Note: "Published by Optica Publishing Group under the terms of the Creative Commons Attribution 4.0 License. Further distribution of this work must maintain attribution to the author(s) and the published article’s title, journal citation, and DOI." Supported by HGF under grant # ZT-I-PF-4-018 “AsoftXm”. Supported by ESF and Free State of Thuringia under grant # 2018 FGR 0080. Supported by EFRE and Free State of Thuringia under grant # 2019 FGI 0013. Supported by Free State of Thuringia under grant # 41-5507-2016. Supported by Horizon 2020 and EMPIR under grant # 20IND04 and 20FUN02.
Contributing Institute(s):
- HIJ / HL (JHL)
Research Program(s):
- 622 - Detector Technologies and Systems (POF4-622) (POF4-622)
- Ptychography 4.0 - Proposal for a pilot project "Information & Data Science" (ZT-I-0025) (ZT-I-0025)
- FISCOV - FISCOV Helmholtz large research infrastructures in the fight against epidemic outbreaks (FISCOV) (FISCOV)
- DFG project G:(GEPRIS)398816777 - SFB 1375: Nichtlineare Optik bis hin zu atomaren Skalen (398816777) (398816777)
- GRK 2675 - GRK 2675: Maßgeschneiderte Metaoberflächen – Erzeugung, Programmierung und Detektion von Licht (437527638) (437527638)
Experiment(s):
- External experiment at external facility/ no experiment at GSI (other)
Appears in the scientific report
2024
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