%0 Journal Article
%A Abel, Johann J.
%A Apell, Jonathan
%A Wiesner, Felix
%A Reinhard, Julius
%A Wünsche, Martin
%A Felde, Nadja
%A Schmidl, Gabriele
%A Plentz, Jonathan
%A Paulus, Gerhard G.
%A Lippmann, Stephanie
%A Fuchs, Silvio
%T Non-destructive depth reconstruction of Al−Al<sub>2</sub>Cu layer structure with nanometer resolution using extreme ultraviolet coherence tomography
%J Materials characterization
%V 211
%@ 1044-5803
%C New York, NY
%I Science Direct
%M GSI-2024-00554
%P 113894
%D 2024
%Z Supported by ESF and Free State of Thuringia under grant # 2015 FGR 0094 and 2018 FGR 0080. Supported by BMBF under grant VIP "X-CoherenT". This is an open access article under the CC BY license (http://creativecommons.org/licenses/by/4.0/).
%F PUB:(DE-HGF)16
%9 Journal Article
%U <Go to ISI:>//WOS:001232537500001
%R 10.1016/j.matchar.2024.113894
%U https://repository.gsi.de/record/350388