Journal Article

GSI-2024-00554

http://join2-wiki.gsi.de/foswiki/pub/Main/Artwork/join2_logo100x88.png Non-destructive depth reconstruction of $Al-Al_{2}Cu$ layer structure with nanometer resolution using extreme ultraviolet coherence tomography

Abel, J. J. (Corresponding author) ; Apell, J. (Corresponding author) ; Wiesner, F. ; Reinhard, J.GSI*HIJ* ; Wünsche, M.HIJ* ; Felde, N. ; Schmidl, G. ; Plentz, J. ; Paulus, G. G.HIJ* ; Lippmann, S. ; Fuchs, S.GSI*HIJ*

2024
Science Direct New York, NY

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Please use a persistent id in citations: doi:10.1016/j.matchar.2024.113894  doi:10.15120/GSI-2024-00554

Note: Supported by ESF and Free State of Thuringia under grant # 2015 FGR 0094 and 2018 FGR 0080. Supported by BMBF under grant VIP "X-CoherenT". This is an open access article under the CC BY license (http://creativecommons.org/licenses/by/4.0/).

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Contributing Institute(s):

1. HIJ / PTS (PTS)

Research Program(s):

1. 631 - Matter – Dynamics, Mechanisms and Control (POF4-631) (POF4-631)
2. DFG project 390918228 - 200kV Transmissionselektronenmikroskop (390918228) (390918228)

Experiment(s):

1. External experiment at external facility/ no experiment at GSI (other)

Appears in the scientific report 2024

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Database coverage:
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