TY  - JOUR
AU  - Abel, Johann J.
AU  - Apell, Jonathan
AU  - Wiesner, Felix
AU  - Reinhard, Julius
AU  - Wünsche, Martin
AU  - Felde, Nadja
AU  - Schmidl, Gabriele
AU  - Plentz, Jonathan
AU  - Paulus, Gerhard G.
AU  - Lippmann, Stephanie
AU  - Fuchs, Silvio
TI  - Non-destructive depth reconstruction of Al−Al<sub>2</sub>Cu layer structure with nanometer resolution using extreme ultraviolet coherence tomography
JO  - Materials characterization
VL  - 211
SN  - 1044-5803
CY  - New York, NY
PB  - Science Direct
M1  - GSI-2024-00554
SP  - 113894
PY  - 2024
N1  - Supported by ESF and Free State of Thuringia under grant # 2015 FGR 0094 and 2018 FGR 0080. Supported by BMBF under grant VIP "X-CoherenT". This is an open access article under the CC BY license (http://creativecommons.org/licenses/by/4.0/).
LB  - PUB:(DE-HGF)16
UR  - <Go to ISI:>//WOS:001232537500001
DO  - DOI:10.1016/j.matchar.2024.113894
UR  - https://repository.gsi.de/record/350388
ER  -