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@ARTICLE{Abel:350388,
author = {Abel, Johann J. and Apell, Jonathan and Wiesner, Felix and
Reinhard, Julius and Wünsche, Martin and Felde, Nadja and
Schmidl, Gabriele and Plentz, Jonathan and Paulus, Gerhard
G. and Lippmann, Stephanie and Fuchs, Silvio},
title = {{N}on-destructive depth reconstruction of
${A}l-{A}l_{2}{C}u$ layer structure with nanometer
resolution using extreme ultraviolet coherence tomography},
journal = {Materials characterization},
volume = {211},
issn = {1044-5803},
address = {New York, NY},
publisher = {Science Direct},
reportid = {GSI-2024-00554},
pages = {113894},
year = {2024},
note = {Supported by ESF and Free State of Thuringia under grant #
2015 FGR 0094 and 2018 FGR 0080. Supported by BMBF under
grant VIP "X-CoherenT". This is an open access article under
the CC BY license
(http://creativecommons.org/licenses/by/4.0/).},
cin = {PTS},
ddc = {670},
cid = {I:(DE-Ds200)PTS-20220701OR463},
pnm = {631 - Matter – Dynamics, Mechanisms and Control
(POF4-631) / DFG project 390918228 - 200kV
Transmissionselektronenmikroskop (390918228)},
pid = {G:(DE-HGF)POF4-631 / G:(GEPRIS)390918228},
experiment = {$EXP:(DE-Ds200)External_experiment-20200803$},
typ = {PUB:(DE-HGF)16},
UT = {WOS:001232537500001},
doi = {10.1016/j.matchar.2024.113894},
url = {https://repository.gsi.de/record/350388},
}