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001     354643
005     20241201173116.0
024 7 _ |2 I:(DE-588b)2008985-5
|a G:(DE-H253)BMBF-13N16678
|d BMBF-13N16678
035 _ _ |a G:(DE-H253)BMBF-13N16678
150 _ _ |a Milliwatt-level efficient gas harmonic EUV source (MEGA-EUV) Multi-pass cell development for post-compression and spectral tuning
|b MEGA-EUV
|y 2023-12-01 - 2026-11-30
371 _ _ |0 0000-0003-2133-5224
|a Heyl, Christoph
450 _ _ |a BMBF-13N16678
|w d
|y 2023-12-01 - 2026-11-30
510 1 _ |0 I:(DE-588b)5309538-8
|a Bundesministerium für Bildung und Forschung
|b BMBF
680 _ _ |a DESY is cooperating with Class 5 Photonics, the University of Hamburg, Amphos and partners from the semiconductor industry as part of the "MEGA-EUV" project. The aim of the project is to develop a high-performance, extreme ultraviolet (EUV) beam source that will achieve up to a 1000-fold increase in throughput for the inspection of microchips.
909 C O |o oai:juser.fz-juelich.de:1033715
|p authority:GRANT
|p authority
909 C O |o oai:juser.fz-juelich.de:1033715
980 _ _ |a G
980 _ _ |a AUTHORITY

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Marc 21