Journal Article GSI-2025-01194

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Characterization of ion track-etched conical nanopores in thermal and PECVD SiO 2 using small angle X-ray scattering

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2025
Beilstein-Institut zur Förderung der Chemischen Wissenschaften Frankfurt, M.

Beilstein journal of nanotechnology 16, 899 - 909 () [10.3762/bjnano.16.68]

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Note: This is an open access article licensed under the terms of the Beilstein-Institut Open Access License Agreement (https://www.beilstein-journals.org/bjnano/terms), which is identical to the Creative Commons Attribution 4.0 International License (https://creativecommons.org/licenses/by/4.0). The reuse of material under this license requires that the author(s), source and license are credited. Third-party material in this article could be subject to other licenses (typically indicated in the credit line), and in this case, users are required to obtain permission from the license holder to reuse the material.

Contributing Institute(s):
  1. Materialforschung (MAT)
Research Program(s):
  1. 632 - Materials – Quantum, Complex and Functional Materials (POF4-632) (POF4-632)
Experiment(s):
  1. UMat: Material Science Proposals at the UNILAC (POF3-6214; X0)

Appears in the scientific report 2025
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Medline ; Creative Commons Attribution CC BY (No Version) ; DOAJ ; Clarivate Analytics Master Journal List ; Current Contents - Physical, Chemical and Earth Sciences ; DOAJ Seal ; Essential Science Indicators ; IF < 5 ; JCR ; SCOPUS ; Science Citation Index Expanded ; Web of Science Core Collection
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 Record created 2025-11-04, last modified 2025-11-17